Industry proven wafer process equipment with long term reliability. Versatile process flexibility in micro/nano machining and patterning. Excellent film etching uniformity and process repeatability.

 

  Industry proven wafer process equipment with long term reliability.

   Versatile process flexibility in micro/nano machining & patterning.

   Excellent film etching uniformity & process repeatability with AVP innovative ion source design.

   Wide range of applications and low cost of ownership.

   Environmentally friendly with only inert gases used in process.

      Micro-Machining/Patterning/Shaping

Communications & Microwave Components

Biomedical and Medical Components & Sensors

Hard Drive, MRAM and other Magnetic Devices

Optical Sensors

MEMS Circuits and Sensors

   Plasma Clean and Texturing

   HCD & LCD Grid Performance

High Current Density Process
High Current Density Process

Low Current Density Process
Low Current Density Process