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Features
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Technical Specifications
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Applications
Industry proven wafer process equipment with long term reliability.
Versatile process flexibility in micro/nano machining & patterning.
Excellent film etching uniformity & process repeatability with AVP innovative ion source design.
Wide range of applications and low cost of ownership.
Environmentally friendly with only inert gases used in process.
Micro-Machining/Patterning/Shaping
Communications & Microwave Components
Biomedical and Medical Components & Sensors
Hard Drive, MRAM and other Magnetic Devices
Optical Sensors
MEMS Circuits and Sensors
Plasma Clean and Texturing
HCD & LCD Grid Performance