{"id":299,"date":"2013-06-17T14:42:15","date_gmt":"2013-06-17T14:42:15","guid":{"rendered":"http:\/\/dennisnguyen.net\/avpsample\/?page_id=299"},"modified":"2025-01-07T15:16:01","modified_gmt":"2025-01-07T23:16:01","slug":"cluster-pvd","status":"publish","type":"page","link":"https:\/\/avptechnologyllc.com\/index.php\/cluster-pvd\/","title":{"rendered":"Cluster PVD"},"content":{"rendered":"<div class=\"su-row\"><div class=\"su-column su-column-size-1-2\"><div class=\"su-column-inner su-u-clearfix su-u-trim\"><img loading=\"lazy\" decoding=\"async\" class=\"alignleft size-full wp-image-1339\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2018\/06\/07i7786_scaled.png\" alt=\"\" width=\"400\" height=\"262\" srcset=\"https:\/\/avptechnologyllc.com\/wp-content\/uploads\/2018\/06\/07i7786_scaled.png 400w, https:\/\/avptechnologyllc.com\/wp-content\/uploads\/2018\/06\/07i7786_scaled-300x197.png 300w\" sizes=\"auto, (max-width: 400px) 100vw, 400px\" \/><\/div><\/div><div class=\"su-column su-column-size-1-2\"><div class=\"su-column-inner su-u-clearfix su-u-trim\">Designed and carefully manufactured in the USA. Industry standard DeviceNet\/PLC automation control. Industry proven and versatile DC\/PDC\/RF magnetron deposition processes.<\/p>\n<p align=\"right\"><a href=\"http:\/\/avptechnologyllc.com\/index.php\/contact-us\/\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-1341\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2018\/06\/request-info-button150.png\" alt=\"\" width=\"150\" height=\"55\" \/><\/a><\/p>\n<p style=\"text-align: left;\" align=\"right\"><\/div><\/div><\/div>\n<p style=\"text-align: left;\" align=\"right\"><style id=\"sp_tab_dynamic_style1410\">#sp-tabpro-wrapper_1410.sp-tab__lay-default .sp-tab__tab-content {width: 100%;}#sp-tabpro-wrapper_1410 .animated {-webkit-animation-duration: 500ms;animation-duration: 500ms;}#sp-wp-tabs-wrapper_1410 .sp-tab__nav {justify-content: start;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default.sp-tab__horizontal-bottom {display: flex;flex-direction: column-reverse;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default.sp-tab__horizontal-bottom > ul {border-top: 1px solid #cccccc;border-bottom: 0;margin-top: 0;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default.sp-tab__horizontal-bottom > ul > li .sp-tab__nav-link.sp-tab__active {border-color: transparent #cccccc#cccccc;margin-top: -1px;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default.sp-tab__horizontal-bottom > ul > li .sp-tab__nav-link,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default.sp-tab__horizontal-bottom > ul > li a,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default.sp-tab__horizontal-bottom > ul > .sp-tab__nav-item {border-top: 0;border-top-left-radius: 0;border-top-right-radius: 0;border-bottom-left-radius: 2px;border-bottom-right-radius: 2px;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default.sp-tab__horizontal-bottom > ul {border-bottom: none;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default.sp-tab__horizontal-bottom .sp-tab__tab-content .sp-tab__tab-pane {border-top: 1px solid #cccccc;border-bottom: 0;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default .sp-tab__tab-content .sp-tab-content > ul,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default .sp-tab__tab-content .sp-tab-content > ol {border-bottom: none;}#sp-wp-tabs-wrapper_1410 > .sp-tab__nav-tabs .sp-tab__nav-link.sp-tab__active .sp-tab__tab_title,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default .sp-tab__nav-link > .sp-tab__card-header {color: #444;}#sp-wp-tabs-wrapper_1410 > .sp-tab__nav-tabs > .sp-tab__nav-item.show .sp-tab__nav-link,#sp-wp-tabs-wrapper_1410 > .sp-tab__nav-tabs > .sp-tab__nav-item .sp-tab__nav-link.sp-tab__active,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default .sp-tab__nav-link > .sp-tab__card-header {background-color: #fff;}#sp-wp-tabs-wrapper_1410 .sp-tab__nav-tabs .sp-tab__nav-item.show .sp-tab__nav-link,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default ul li .sp-tab__nav-link.sp-tab__active {border-color: #cccccc#cccccc transparent;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul > li > .sp-tab__nav-link,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul > li > a {cursor: pointer;border-color: #cccccc;padding-top: 15px;padding-right: 15px;padding-bottom: 15px;padding-left: 15px;}#sp-wp-tabs-wrapper_1410 > .sp-tab__nav-tabs .sp-tab__nav-link {border: 1px solid #cccccc;height: 100%;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul > li .sp-tab__nav-link,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul > li a,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul > .sp-tab__nav-item {border-top-left-radius: 2px;border-top-right-radius: 2px;}#sp-wp-tabs-wrapper_1410 .sp-tab__nav-tabs .sp-tab__nav-item {margin-bottom: -1px; }#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul .sp-tab__nav-item,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default .sp-tab__nav-link.collapsed > .sp-tab__card-header {background-color: #eee;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul .sp-tab__nav-item {margin-right: 10px;margin-top: 5px;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul .sp-tab__nav-item .sp-tab__nav-link:hover .sp-tab__tab_title,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul .sp-tab__nav-item a:hover .sp-tab__tab_title,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default .sp-tab__nav-link.collapsed .sp-tab__card-header:hover {color: #444;transition: .3s;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul .sp-tab__nav-item:hover,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default .sp-tab__nav-link.collapsed > .sp-tab__card-header:hover {background-color: #fff;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul .sp-tab__nav-item:last-child {margin-right: 0;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > .sp-tab__tab-content .sp-tab__tab-pane {border: 1px solid #cccccc;padding-top: 20px;padding-right: 20px;padding-bottom: 20px;padding-left: 20px;border-top: 0px;background-color: #ffffff;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul {border-bottom: 1px solid #cccccc;}@media(max-width:480px) {#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul li.sp-tab__nav-item {width: 100%;margin-right: 0px;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul li.sp-tab__nav-item:last-child {margin-bottom: -1px;}}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > ul .sp-tab__nav-item .sp-tab__tab_title,#sp-wp-tabs-wrapper_1410.sp-tab__lay-default span > .sp-tab__card-header {font-weight: 600;font-style: normal;font-size: 16px;line-height: 22px;letter-spacing: 0px;color: #444;margin: 0px;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > .sp-tab__tab-content .sp-tab__tab-pane {font-weight: 400;font-style: normal;font-size: 16px;line-height: 24px;letter-spacing: 0px;color: #444;}#sp-wp-tabs-wrapper_1410.sp-tab__lay-default > .sp-tab__tab-content .sp-tab__tab-pane ul li a, #sp-wp-tabs-wrapper_1410.sp-tab__lay-default .sp-tab__tab-content .sp-tab__tab-pane ol li a {color: #444;}<\/style>\t\t<div id=\"sp-wp-tabs-wrapper_1410\" class=\"sp-tab__lay-default\" data-preloader=\"1\" data-activemode=\"tabs-activator-event-click\">\n\t\t\t<div class=\"sp-tab__preloader\">\n\t\t<div class=\"sp-tab__spinner\">\n\t\t\t<div class=\"rect1\"><\/div>\n\t\t\t<div class=\"rect2\"><\/div>\n\t\t\t<div class=\"rect3\"><\/div>\n\t\t\t<div class=\"rect4\"><\/div>\n\t\t\t<div class=\"rect5\"><\/div>\n\t\t<\/div>\n\t<\/div>\n\t<ul class=\"sp-tab__nav sp-tab__nav-tabs\" id=\"sp-tab__ul\" role=\"tablist\">\n\t\t\t\t<li class=\"sp-tab__nav-item\" role=\"tab\">\n\t\t\t\t<span class=\"sp-tab__nav-link sp-tab__active\" data-sptoggle=\"tab\" for=\"#tab-14101\" role=\"tab\" aria-controls=tab-14101 aria-selected=true tabindex=0>\n\t\t\t\t\t<span class=\"tab_title_area\"><H4 class=\"sp-tab__tab_title\">Features<\/H4><\/span>\n\t\t<\/span>\n\t\t\t<\/li>\n\t\t\t\t\t\t<li class=\"sp-tab__nav-item\" role=\"tab\">\n\t\t\t\t<span class=\"sp-tab__nav-link\" data-sptoggle=\"tab\" for=\"#tab-14102\" role=\"tab\" aria-controls=tab-14102 aria-selected=true tabindex=0>\n\t\t\t\t\t<span class=\"tab_title_area\"><H4 class=\"sp-tab__tab_title\">Technical Specifications<\/H4><\/span>\n\t\t<\/span>\n\t\t\t<\/li>\n\t\t\t\t\t\t<li class=\"sp-tab__nav-item\" role=\"tab\">\n\t\t\t\t<span class=\"sp-tab__nav-link\" data-sptoggle=\"tab\" for=\"#tab-14103\" role=\"tab\" aria-controls=tab-14103 aria-selected=true tabindex=0>\n\t\t\t\t\t<span class=\"tab_title_area\"><H4 class=\"sp-tab__tab_title\">Applications<\/H4><\/span>\n\t\t<\/span>\n\t\t\t<\/li>\n\t\t\t<\/ul>\n<div class=\"sp-tab__tab-content\">\n\t\t\t\t<div id=\"tab-14101\" class=\"sp-tab__tab-pane sp-tab__show sp-tab__active\" role=\"tabpanel\">\n\t\t\t\t\t<div class=\"sp-tab-content animated fadeIn\"><p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0 Industry proven thin film equipment with high throughput and long-term reliability.<\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0 Simple and elegant vacuum design, carefully manufactured in the USA to ensure high quality for vacuum processes.<\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0 Industry standard DeviceNet\/PLC automation control.<\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0 Industry proven and versatile DC\/PDC\/RF magnetron deposition (reactive, non-reactive) processes.<\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0 Low cost of ownership (CoO) with ease of maintenance, and high availability of Commercial off the Shelf (COTS) parts with extensive documentation.<\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0 Optimized magnetron for RF magnetron high rate Al2O3 deposition, and thick magnetic sputtering target (~4mm for NiFe) to increase productivity.<\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0 Windows based user-friendly, SEMI standard GUI software.<\/p>\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<div id=\"tab-14102\" class=\"sp-tab__tab-pane \" role=\"tabpanel\">\n\t\t\t\t\t<div class=\"sp-tab-content animated fadeIn\"><p><img decoding=\"async\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/09\/cluster-pvd-tech-specs1.png\" \/><\/p>\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<div id=\"tab-14103\" class=\"sp-tab__tab-pane \" role=\"tabpanel\">\n\t\t\t\t\t<div class=\"sp-tab-content animated fadeIn\"><p><strong>Production Thin Film Process<\/strong><\/p>\n<div class=\"su-row\"><div class=\"su-column su-column-size-1-2\"><div class=\"su-column-inner su-u-clearfix su-u-trim\"><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0Oxides: Al<sub>2<\/sub>O<sub>3<\/sub>, Ta<sub>2<\/sub>O<sub>5<\/sub>, SiO<sub>2<\/sub>, CrSiO<sub>x<\/sub>, ITO<\/p>\n<p><span style=\"font-family: inherit;font-size: inherit\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0Nitrides: AlN, SiN, TiN, CrN, FeN, FeAlN<\/span><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0Carbides: SiC, Carbon<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" style=\"font-family: inherit;font-size: inherit\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/><span style=\"font-family: inherit;font-size: inherit\">\u00a0 \u00a0Silicides: AlSi, TiSi<\/span><\/p>\n<p><\/div><\/div><div class=\"su-column su-column-size-1-2\"><div class=\"su-column-inner su-u-clearfix su-u-trim\"><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0Metals: Cr, Ru, Au, Ag, Cu, Ti, Ni, Al, W, Rh, In, Sn, NiCr, NiCu, CrCu, AlCu, TiW<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" style=\"font-family: inherit;font-size: inherit\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/><span style=\"font-family: inherit;font-size: inherit\">\u00a0 \u00a0Magnetic Materials: CoFe, CoNiFe, NiFe, NiFeB, NiFeNb, CoCr, CoPt, CoCrPt<\/span><\/p>\n<p><\/div><\/div><\/div>\n<p><strong>Production Thin Film Samples<\/strong><\/p>\n<table>\n<tbody>\n<tr style=\"border-bottom: 1px solid #dbdbdb\">\n<td valign=\"top\"><a href=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/11.png\"><img loading=\"lazy\" decoding=\"async\" class=\"alignleft size-thumbnail wp-image-583\" style=\"border: 1px solid black;margin: 1px\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/11-150x150.png\" alt=\"RF Magnetron Sputtered Al\u2082O\u2083\" width=\"150\" height=\"150\" \/><\/a><\/td>\n<td valign=\"top\">\n<p style=\"text-align: left\"><strong>RF Magnetron Sputtered Al<sub>2<\/sub>O<sub>3<\/sub><\/strong><\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" style=\"font-family: inherit;font-size: inherit\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/><span style=\"font-family: inherit;font-size: inherit\">\u00a0 \u00a0RF Magnetron sputtered Al<\/span><sub style=\"font-family: inherit\">2<\/sub><span style=\"font-family: inherit;font-size: inherit\">O<\/span><sub style=\"font-family: inherit\">3<\/sub><span style=\"font-family: inherit;font-size: inherit\"> deposition rate is typically &gt;800A\/min, ~50% higher than pure RF sputtered<br \/>\n<\/span><\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" style=\"font-family: inherit;font-size: inherit\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/><span style=\"font-family: inherit;font-size: inherit\">\u00a0 \u00a0Wafer surface temperature &lt; 50<\/span><sup style=\"font-family: inherit\">o<\/sup><span style=\"font-family: inherit;font-size: inherit\">C during process with backside cooling<br \/>\n<\/span><\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" style=\"font-family: inherit;font-size: inherit\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/><span style=\"font-family: inherit;font-size: inherit\">\u00a0 \u00a0High throughput for up to ~3\u03bcm film deposition<\/span><\/p>\n<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #dbdbdb\">\n<td valign=\"top\"><a href=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/21.png\"><img loading=\"lazy\" decoding=\"async\" class=\"alignright size-thumbnail wp-image-582\" style=\"border: 1px solid black;margin: 1px\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/21-150x150.png\" alt=\"Reactive Sputtered SiO\u2082 film\" width=\"150\" height=\"150\" \/><\/a><\/td>\n<td valign=\"top\">\n<p style=\"text-align: left\"><strong>Reactive Sputtered SiO<sub>2<\/sub> film<\/strong><\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0Reactive sputtered SiO<sub>2<\/sub> film has typical deposition rate &gt;60nm\/min; thickness uniformity 1\u03c3&lt;0.5%; Optimized Optical Loss for ~1um film &lt; 5db\/cm<\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" style=\"font-family: inherit;font-size: inherit\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/><span style=\"font-family: inherit;font-size: inherit\">\u00a0 \u00a0Full-face sputtering with no particle contamination and high target usage<\/span><\/p>\n<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #dbdbdb\">\n<td valign=\"top\"><a href=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/31.png\"><img loading=\"lazy\" decoding=\"async\" class=\"alignright size-thumbnail wp-image-581\" style=\"border: 1px solid black;margin: 1px\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/31-150x150.png\" alt=\"DC Magnetron Sputtered NiFe film\" width=\"150\" height=\"150\" \/><\/a><\/td>\n<td valign=\"top\">\n<p style=\"text-align: left\"><strong>DC Magnetron Sputtered NiFe film<\/strong><\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0Magnetic NiFe film has deposition rate ~15A\/s\/kW; thickness uniformity 1\u03c3&lt;1%<\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" style=\"font-family: inherit;font-size: inherit\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/><span style=\"font-family: inherit;font-size: inherit\">\u00a0 \u00a0Excellent magnetic softness with Hc_h &lt; 0.2Oe, Hk_h &lt; 5Oe; Sqr_h &lt; 5%<\/span><\/p>\n<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #dbdbdb\">\n<td valign=\"top\"><a href=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/41.png\"><img loading=\"lazy\" decoding=\"async\" class=\"alignright size-thumbnail wp-image-580\" style=\"border: 1px solid black;margin: 1px\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/41-150x150.png\" alt=\"Reactive Sputtered AlN film\" width=\"150\" height=\"150\" \/><\/a><\/td>\n<td valign=\"top\">\n<p style=\"text-align: left\"><strong>Reactive Sputtered AlN film<\/strong><\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/>\u00a0 \u00a0Reactive sputtered AlN film has deposition rate ~3A\/s\/kW; thickness uniformity 1\u03c3&lt;1%; Refractive index around 1.94<\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" style=\"font-family: inherit;font-size: inherit\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/><span style=\"font-family: inherit;font-size: inherit\">\u00a0 \u00a0Reactive sputtered AlN film has typically (002) oriented column structure, with thermal conductivity around 30~50 W\/m-K<br \/>\n<\/span><\/p>\n<p style=\"text-align: left\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-280\" style=\"font-family: inherit;font-size: inherit\" src=\"http:\/\/avptechnologyllc.com\/wp-content\/uploads\/2013\/06\/li21.png\" alt=\"\" width=\"10\" height=\"10\" \/><span style=\"font-family: inherit;font-size: inherit\">\u00a0 \u00a0Optimizing film properties via substrate biasing and heating up to 400<\/span><sup style=\"font-family: inherit\">o<\/sup><span style=\"font-family: inherit;font-size: inherit\">C<\/span><\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>&nbsp;<\/p>\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-299","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v24.3 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Cluster PVD - AVP Technology, LLC<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/avptechnologyllc.com\/index.php\/cluster-pvd\/\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta 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