- Industry proven wafer process equipment with long term reliability.
- Versatile process flexibility in micro/nano machining & patterning.
- Excellent film etching uniformity & process repeatability with AVP innovative ion source design.
- Wide range of applications and low cost of ownership.
- Environmentally friendly with only inert gases used in process.
- Communications & Microwave Components
- Biomedical and Medical Components & Sensors
- Hard Drive, MRAM and other Magnetic Devices
- Optical Sensors
- MEMS Circuits and Sensors
- Plasma Clean and Texturing
- HCD & LCD Grid Performance
High Current Density Process
Low Current Density Process