- Industry proven thin film equipment with high throughput and long term reliability.
- Simple and elegant vacuum design, and carefully manufactured in the USA to ensure high quality for vacuum processes.
- Industry standard DeviceNet/PLC automation control.
- Industry proven and versatile DC/PDC/RF magnetron deposition (reactive, non-reactive) processes.
- Low cost of ownership (CoO) with ease of maintenance, and high availability of Commercial off the Shelf (COTS) parts with extensive documentation.
- Optimized magnetron for RF magnetron high rate Al2O3 deposition, and thick magnetic sputtering target (~4mm for NiFe) to increase productivity.
- Windows based user-friendly, SEMI standard GUI software.
Production Thin Film Process
Production Thin Film Samples